Precision Optics

Precision optics are required in different applications accross several industries, such as semiconductor, industrial sensors and automotive. For achieving excellent optical performance precise metrology instruments are required for deposition processes of:

  • Filter coatings (notch, longpass, AR, UV, Bandpass for VIS, NIR, LWIR)
  • Black chrome
  • Mirrors
  • Beam splitter
  • Veril
  • High index
  • Low index

Testing

  • Sheet resistance
  • Conductivity
  • Thickness
  • Homogeneity

Substrates

  • Ultra thin glass
  • Flexible glass
  • Wafer
    • Si
    • InP
    • GaAs
  • Standards
    • Catalog optics
    • Laser optics

Processes

  • Wafer level
  • Batch systems
  • Load lock
  • Cluster systems
  • Inline
  • S2S
  • Carrier

Environment

  • In-vacuo/ In-situ
  • Ex-vacuo/ Ex-situ
  • Inline
  • Offline

Types

  • Filter coatings (Notch, longpass, AR, UV
  • Bandpass (VIS, NIR, LWIR)
  • Black chrome
  • Mirrors
  • Beam splitter
  • Veril
  • High index
  • Low index

For characterization of deposition processes in precision optics SURAGUS refers to the following products:

Contact

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