EddyCus® TF inline

Non-contact sheet resistance and layer thickness measurement solutions for process control

The EddyCus TF inline series measures layer properties such as metal layer thickness or sheet resistance in non-contact on various substrates.  Typical substrates are glass, foil, paper, wafer, plastic or ceramic. Measurements are obtained by permanent measurements or by trigger events to obtain equidistant results in fast moving coating processes or measure on specific positions on small specimen. Monitoring is possible in atmosphere and in vacuum. The measurements are obtained using high samples rate and can be directly provided for process control systems and customer software. Additionally SURAGUS offers the monitoring software EddyCus TF control that visualizes, stores and analyses metrology data.

 

Advantages

  • Non-contact real time measurement
  • High measurement speed up to 1,000 measurements/ sec.
  • Fixed sensor installation or traversing sensor installation
  • Integration of 1 – 99 monitoring lanes per system
  • Process control at atmosphere or in vacuum
  • Measurements very close to the edge of the substrate are possible in many applications
  • Long term stability by temperature compensated measurements in changing environment
  • Large distances to the testing material (eg. gap of 60 mm / 2.4 inch)
  • Characterization of covered conductive layers or encapsulated substrates
  • Numerous software integrated analysis and statistic functions
  • Easy set up by EddyCus RampUp software incl. wizard for system calibration
  • Wear- free
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Measurement applications

  • Sheet resistance measurement of 0.1 mOhm/sq up to 1 kOhm/sq
  • Determination of the layer thickness of metal layers from 2 nm – 2 mm
  • Layer thickness measurement of metal foils
  • Measurement of the residual moisture in wet layers by non-contact permittivity measurement   

Processes

  • Deposition (PVD, ALD, (PE)CVD, electroplating, printing, spraying etc.)
  • Ablation/ structuring (etching, polishing, laser etc.)
  • Doping/ Implantation
  • Tempering/ AnnealingDrying/ Heating

Applications

  • Architectural glass (LowE layers)
  • Packaging materials
  • Displays and touch screens
  • Photovoltaics
  • Mirror coatings
  • Capacitors
  • OLEDs and LEDs
  • Smart glass
  • Metal layers and wafer metallization
  • De-icing and heating
  • Batteries and fuel cells
  • Coated paper and conductive textiles
  • Graphene layers
  • Antibacterial coatings

Motivation for the use of inline metrology

  • Process optimization/ control for fast and homogeny  deposition
  • Efficient layer stack according to the functionality (e.g. high transparency and low resistivity, good emissivity, good barrier properties)
  • Increasing of the layer homogeneity especially on large substrates
  • Optimization of the processing time and machine utilization
  • Optimization of material input / usage (sputter target)
  • Planning of maintenance cycles („predictive maintenance“)
  • Quality assurance

SURAGUS offers inline and offline testing systems to support the achievement of those goals.

non-contact_inline_sheet_resistance_testing_installation
Inline Schichtwiderstandsprüfung von Dünnschichten
SURAGUS Inline Anisotropie Sensor Schichtwiderstand
kontaktfreie Schichtwiderstandsmessung im Roll-2-Roll Prozess

Additional Options

  • Standardized and customized measurement bridges
  • Determination of electrical anisotropy
  • Hardware trigger 5/12/24 V or 4-20 mA
  • Integrated temperature measurement
  • Integrated optical sensors for the determination of the optical transparency/ density (OEM)
  • Integrated distance measurement by ultrasound, laser triangulation or capacitive sensors (OEM)

Setups

  • Traversing sensor vs. fixed sensor installation
  • At atmosphere or in vacuum (ex-vacuo/ in-vacuo)

SURAGUS is providing an information set consisting e.g. a general hardware presentation, CAD/ Step files and drawings, as well as block wiring diagrams.  Hardware offering contain:

  • Sensors
    • Sensor S & M (CAD / Step files and drawings upon request)
    • Other sensors XS, L , customized layouts are also possible
  • Mini control cabinet
    • M & L (CAD / Step files, block wiring diagram and drawings upon request)
    • Others are also possible (IP65, S customized layouts)
  • Accessories
    • Standard and customized measurement bridges
    • Vacuum feedthroughs (e.g. KF40, CF63)
    • Mounting brackets and adapter plates
    • Industrial PCs
    • IO – Modules
    • CAD / Step files and drawings upon request

The procedures for the system selection and integration are standardized. In addition, a checklist and a SURAGUS project manager as well as contact person will be available for you. The hardware integration and setup can be done both by a SURAGUS service team as well as by the customer. SURAGUS provides an easy-to-use setup software that guides the user by a wizard through the setup steps.

 

Software “EddyCus TF inline Control” incl. Database module

  • Graphical live view (various time windows of 1 minute to 24 hours)
  • Analysis view (data selection from database, statistics)
  • Data Sorting by time, distance, coil number, barcode or data code matrix)
  • Dialog for creating, updating or extending system calibrations
  • Dialog for parameterization of I/O modules for analog and digital data transfer and parameterization of alarms for exceeding lower and upper thresholds
  • Automatic and manual data export (csv, txt, xls, …)
  • Automatic database cleaning

Other communication options

  • Direct implementation of sensors using .Net libraries (documentation, project examples, sensor mockup are provided pre setup and test)
  • Data transmission via standardized protocols (e.g. Modbus) or TCP/IP based protocols
  • Data access via OPC by KEPServer with ODBC client
  • Analog or digital communication via I/O module(s), individual  parameterizable
  • Data access via database mapping
  • Additional solutions on request
EddyCus TF inline Control Software

Stephan Adam


Stephan Adam
Sales Manager

+49 (0) 351 321 11-522
info@suragus.com

  What is 3 × 7?

By sending this form, I permit SURAGUS GmbH to send the information provided in this questionnaire to this e-mail address. All information remain inside the SURAGUS organization.

Enter additional information
Which physical parameter shall be analyzed? Sheet resistance Sheet thickness of conductive films
Additional measurement Optical transmission Anisotropy Substrate thickness measurement
What kind of testing system do you need? Singlepoint measurement device Mapping device In-line system
Boundary conditions

such as glass, foil or wafer

(Ohm/sq)

Additional information

By sending this form, I permit SURAGUS GmbH to send the information provided in this questionnaire to this e-mail address. All information remain inside the SURAGUS organization.