Contactless sheet resistance mapping system

The Eddy­Cus TF map 5050SR is a non-con­tact map­ping sys­tem for high-res­ol­u­tion ima­ging of the sheet res­ist­ance or cor­rel­ated pro­pri­et­ies such as met­al thick­ness for sampling areas of 50 x 50 mm (2 x 2 inch) up to 500 x 500 mm (20 x 20 inch). The bench-top device auto­mat­ic­ally meas­ures at vari­ous meas­ure­ments points, typ­ic­ally with a pitch in X and Y of 1 mm (40 mil) gen­er­at­ing ac­cur­ate map­pings of street res­ist­ance or thick­ness across the en­tire sample area. The res­ult­ing high-res­ol­u­tion prop­erty im­ages res­ult­ing from many thou­sands of meas­ure­ment points, con­tains vari­ous in­form­a­tion valu­able for R&D and qual­ity as­sur­ance.

Ad­vant­ages

  • Non-con­tact meas­ure­ment
  • High-res­ol­u­tion meas­ure­ments with 1 mm pitch (0.25 to 10 mm is also avail­able)
  • Meas­ure­ment is in­de­pend­ent from con­tact qual­ity in com­pas­sion to con­tact­ing meth­ods
  • High-res­ol­u­tion ima­ging of con­duct­ive thin-films ex­pos­ing ma­ter­i­al and pro­cess in­homo­gen­eit­ies
  • Char­ac­ter­iz­a­tion of covered con­duct­ive lay­ers and en­cap­su­lated sub­strates
  • Nu­mer­ous soft­ware in­teg­rated ana­lys­is func­tions (his­to­gram, stand­ard de­vi­ation, line scans, single-point ana­lys­is etc.)
  • Load­ing and reana­lyz­ing data sets
  • Stor­age and ex­port of meas­ure­ment and map­ping data
  • User-friendly PDF re­port­ing for sys­tem­at­ic doc­u­ment­a­tion

Ap­plic­a­tion

  • Con­tact­less sheet res­ist­ance map­ping of thin films
  • Uni­form­ity con­trol and ex­am­in­a­tion of lay­er ho­mo­gen­eity
  • De­fecto­scopy and lay­er ana­lys­is
  • Meas­ur­ing and map­ping of the thick­ness of metal­lic lay­ers
  • Qual­ity con­trol, in­com­ing in­spec­tion, in­spec­tion of out­go­ing goods

Spe­cific­a­tion

  • Meas­ur­ing range : 0.001 to 1000 ohms / sq (oth­er on re­quest)
  • Sample sizes : 50 x 50 mm to 500 x 500 mm²

Pro­cesses

  • De­pos­ition (sput­ter­ing, evap­or­a­tion , ALD, CVD, elec­tro­plat­ing, print­ing, cast­ing, etc.)
  • Ab­la­tion (etch­ing, pol­ish­ing, laser, EDM etc.)
  • Dop­ing
  • An­neal­ing

Area of ap­plic­a­tion

  • R & D and QA of con­duct­ive lay­ers and lay­er sys­tems
  • Metal­lic lay­ers and met­al foils
  • Photo­vol­ta­ic (Si and thin-film PV)
  • Wafer metal­liz­a­tion
  • Smart glass ap­plic­a­tions / elec­tro­chromic glass / dy­nam­ic glass / Smart Glass
  • Ar­chi­tec­tur­al Glass ( LowE )
  • Mir­ror and re­flect­ive coat­ings
  • Elec­trodes in en­ergy stor­age
  • Con­duct­ive pa­per and con­duct­ive tex­tiles
  • De-icing and heat­ing ap­plic­a­tions
  • Ca­pa­cit­or films
  • Bat­tery elec­trodes
  • Dis­plays, touch screens
  • OLED & LED ap­plic­a­tions

Vari­ants

  • Sheet res­ist­ance [Ohm / sq]
  • Thick­ness of metal­lic lay­ers [nm, µm]
  • An­iso­tropy Ima­ging

Ma­ter­i­als and lay­ers 

  • Trans­par­ent con­duct­ive ox­ides (TCOs such as ITO, AZO, FTO, etc.)
  • Thin met­al lay­ers (5 nm to 2 mm de­pend­ing on the con­duct­iv­ity)
  • Doped semi­con­duct­ors (Sil­ic­on)
  • Met­al meshes and met­al wire struc­tures (Sil­ver-nano-wires)
  • Graphene, Graph­ite and car­bon nan­otubes (CNT)
  • Con­duct­ive inks and lac­quers
  • Oth­er con­duct­ive films
Sheet resistance mapping device EddyCus® TF map 5050
Homogeneity measurement device EddyCus® TF map 5050
Measurement-field sheet resistance mapping device EddyCus® TF map 5050
SURAGUS EddyCus® TF map 5050SR sheet resistance mapping device
Sheet resistance mapping device EddyCus® TF map 5050SR side view

Soft­ware and device con­trol

  • Very user-friendly soft­ware
  • Easy-to-use stat­ist­ic­al ana­lys­is op­tions
  • Vari­ous data ana­lys­is, data sav­ing and ex­port op­tions
Sheet Resistance Analyzer Software shows sheet resistance mapping results like homogeneity or line profile

Additional products in this section

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SURAGUS sales team
+49 351 321 11-522 or info@suragus.com

What is 3 + 5?
Enter additional information
Which physical parameter is to be characterized? Sheet resistance Sheet thickness of conductive films
Additional measurements Optical transmission Anisotropy Substrate thickness measurement
Which kind of measurement device do you need? Singlepoint measurement device Mapping device In-line system
Boundaries

wie Glas, Folie, Wafer

in Ohm/sq

Additional information