EddyCus® TF lab 2020 Series – Non-contact Sheet Resistance and Layer Thickness Measurement Device for Single Point Measurements

The EddyCus® TF lab 2020 Series allows manual single point measurements of conductive thin films and layer thickness measurement of thin metal layers in non-contact mode. The compact bench-top device is ideal for fast and accurate measurements of samples up to 200 x 200 mm² (8 x 8 inches). In addition to the measurement of thin conductive layers also doped wafers and conductive polymers can be analyzed.

Highlights

  • Non-contact real time measurement
  • Precise measurement of conductive thin films
  • Characterization of hidden and encapsulated conductive layers
  • Measurement data saving and export functions

Types

Characteristics

  • Sheet resistance
  • Thickness measurement of metal layers
  • Single point measurement
  • Quality control, input and output control
  • Sample sizes: 10 x 10 mm² to 200 x 200 mm² (0.5 x 0.5 inches to 8 x 8 inches)
  • Measurement range: 0.1 mOhm/sq to 100 kOhm/sq

Applications

  • Coated architectural glass, e.g. LowE
  • Displays, touch screens and  flat panel displays
  • OLED and LED applications
  • Smart glass
  • Graphene layers
  • Photovoltaic wafers and cells
  • Semiconductor wafers
  • Metallization layers and wafer metallization
  • De-icing and heating applications
  • Battery electrodes
  • Conductively coated paper and conductive textiles

REQUEST A QUOTE

 

Please select your preferred measurement parameter below

Sheet Resistance

Metal Thickness

Electrical Anisotropy

Wet Coating Thickness Residual Moisture

Resistivity Conductivity

EddyCus® TF lab 2020SR – Non-contact Single Point Sheet Resistance Tester

The EddyCus® TF lab 2020SR is a non-contact single point sheet resistance measurement system. The device contains an eddy current sensor set that induces weak currents into conductive films and material. The induced currents in the specimen generate an electromagnetic field that correlates with the sheet resistance of the measure object. The technology is independent from surface characteristics or morphology,  Furthermore it does not require any sort of sufficient specimen contact or preparation such as known from 2 or 4 point probe testing (2PP, 4PP) or hall effect or Van-der-Pauw measurements. It neither requires the setup of test structures nor it is affected by surface roughness or non-conductive encapsulations or passivation layers. Additionally, the measurement does not physically affect the tested thin-film. Eddy current Instruments have a long life time since there is mechanical wearing. Its independence from contact qualities and its high speed allows enables high repeatabilities and the accuracies that are beneficial for systematic quality assurance of various thin-films in R&D and testing laboratories. The EddyCus tools can be driven by SURAGUS software with various data recording and export functions or by customer software driven by SURAGUS software development kits.

Software and Device Control

  • Very user-friendly software
  • Intuitive, touch display navigation
  • Real-time measurement of sheet resistance and layer thickness
  • Software-assisted manual mapping option
  • Various data saving and export options

Data Sheet for EddyCus® TF lab 2020SR

Sheet resistance measurement technology Non-contact eddy current sensor
Substrates Flexible and solid substrates e.g. foils, glass, plastics, wafer, panels, plates
Substrate area 8 inch / 204 mm x 204 mm (open to three sides)
Max. sample thickness / sensor gap (defines distances) 1 / 2 / 5 / 10 / 25 mm (defined by the thickest sample / application)
Sheet resistance range

accuracy can be optimized over sheet resistance decade
within a customer specified range
0.0001 – 10 Ohm/sq; 1 to 5 % accuracy
0.1 – 1,000 Ohm/sq; 1 to 5 % accuracy
10 – 100,000 Ohm/sq; 2 to 8 % accuracy
Thickness measurement of thin films (e.g. copper) 1 nm – 2 mm (in accordance with sheet resistance (cf. our calculator))
Device dimension (w/h/d) 11.4 x 5.5 x 17.5 inch / 290 mm x 140 mm x 445 mm
Weight 10 kg
Available features Metal thickness measurement
Sheet resistance anisotropy sensor

 

Contact Us

You are welcome to contact our team for

  • Addressing questions
  • Request demo measurements
  • Request online or live demonstratons
  • Request quotations

CONTACT US

Picture Gallery of the EddyCus® TF lab 2020SR

Sheet resistance measurement device EddyCus® TF lab 2020SR front
Sheet resistance measurement device EddyCus® TF lab 2020SR isometric view
Single point thin film sheet resistance measurement device EddyCus® TF lab 2020SR isometric view
Sheet resistance measurement device EddyCus® TF lab 2020 with monitor
Sheet resistance measurement device EddyCus® TF lab 2020SR with foil
Sheet resistance measurement device EddyCus® TF lab 2020SR with a glass
Single point thin film sheet resistance measurement device EddyCus® TF lab 2020SR with a wafer
Sheet resistance measurement device EddyCus® TF lab 2020SR with wafer and software

Product Overview Sheet Resistance Measurement Systems

EddyCus® TF lab 2020MT – Non-contact Single Point Metal Thickness Tester

The EddyCus® TF lab 2020MT allows the non-contact metal thicknesses measurement of transparent and non-transparent layers. The measurement is achieved using a non-contact eddy current sensor. It demines the metal thickness of materials with known or (rather) constanst conductivity in real-time. This non-contact testing technology enables a precise measurement in a wide thickness range starting at a few nanometer thickness reaching up to the characterization of thick metal sheets and plates. The technology is also able to characterize metal layers that are covered by non-conducive materials. SURAGUS offers material specific setups for very thin layers and also very thick metals and common alloys. The measurement method is extremely robust and excels with a high repeatability and high accuracy. Additionally, it does not require any optical transparency nor to apply a physical contact. Therefore, it is used for a wide range of application for quick tests or systematic quality assurance. 

Software and Device Control

  • Very user-friendly software
  • Intuitive, touch display navigation
  • Real-time measurement of sheet resistance and layer thickness
  • Software-assisted manual mapping option
  • Various data saving and export options

Data Sheet for EddyCus® TF lab 2020MT

Sheet resistance measurement technology Non-contact eddy current sensor
Substrates e.g. foil, glass and wafer
Substrate area 8 inch / 204 mm x 204 mm (open to three sides)
Max. sample thickness / sensor gap (defines distances) 1 / 2 / 5 / 10 / 25 mm (defined by the thickest sample / application)
Metal thickness range 1 – 20 nm; 5 % accuracy & 2.5 % repeatability (specific SURAGUS thickness models may apply)
0.02 – 200 µm; 3 % accuracy & 1.5 % repeatability
200 – 2000 µm; 2 % accuracy & 1 % repeatability
Sheet resistance of thin films (ITO) 0.1 mOhm/sq to 100 kOhm/sq
Device dimension (w/h/d) 11.4 x 5.5 x 17.5 inch / 290 mm x 140 mm x 445 mm
Weight 10 kg
Available features Sheet resistance measurement
Electrical anisotropy sensor

 

Contact Us

You are welcome to contact our team for

  • Addressing questions
  • Request demo measurements
  • Request online or live demonstratons
  • Request quotations

CONTACT US

Picture Gallery of the EddyCus® TF lab 2020MT

Sheet resistance measurement device EddyCus® TF lab 2020SR front
Sheet resistance measurement device EddyCus® TF lab 2020SR isometric view
Single point thin film sheet resistance measurement device EddyCus® TF lab 2020SR isometric view
Sheet resistance measurement device EddyCus® TF lab 2020 with monitor
Sheet resistance measurement device EddyCus® TF lab 2020SR with foil
Sheet resistance measurement device EddyCus® TF lab 2020SR with a glass
Single point thin film sheet resistance measurement device EddyCus® TF lab 2020SR with a wafer
Sheet resistance measurement device EddyCus® TF lab 2020SR with wafer and software

Product Overview Metal Thickness Testing Devices

EddyCus® TF lab 2020A – Non-Contact Electrical Anisotropy and Sheet Resistance Tester

The EddyCus® TF lab 2020A (Anisotropy) is dedicated to the measurement of the electrical anisotropy and the sheet resistances in certain directions. This is especially relevant for functional thin-film that need to be conductive mainly in a certain direction, while achieving highest optical transparencies. This novel device is equipped with integrated sheet resistance anisotropy sensors. This sensors induce directed currents into machine and traverse direction. The measured directed sheet resistances are used to precisely measure the electrical anisotropy. This non-contact testing method provides results in real-time and prevents time consuming destructive testing. It is used for quick tests and systematic quality assurance in various industries. 

 

Terms and Concept

  •  “Sheet resistance anisotropy” refers to a difference in electrical resistivity measured parallel and perpendicular (traverse) to the machine direction
  • Many wire and mesh structures can have an anisotropic sheet resistance

Electrical Anisotropy…

  • …can be optimized according to the layout of the contact pattern
  • …can save material and improve optical transparency to sheet resistance ratio

Information

  • Sheet resistance (Ohm/sq)
    • Machine direction (Ohm/sq)
    • Traverse direction (Ohm/sq)
  • Combined sheet resistance (Ohm/sq)
  • Anisotropy
    • Ratio TD/MD
    • Anisotropy (%)

Typical Materials

  • Nano-wires (Ag, Pt, Au etc.)
  • Metal meshes and grids (Cu, Au, etc.)
  • Carbon Nano Tubes
  • Nano-rods

Anisotropy Description

aniso ratio.jpg
aniso percent.jpg

 

 

 

 

Electrical Anisotropy.PNG
Electrical Anisotropy2.PNG

Data Sheet for the EddyCus® TF lab 2020A

Sheet resistance measurement technology Non-contact eddy current sensor
Substrates e.g. foil, glass and wafer, etc.
≥ 25 mm x 25 mm
Substrate area 8 inch / 204 mm x 204 mm (open to three sides)
Max. sample thickness / sensor gap (defines distances) 1 / 2 / 5 / 10 / 25 mm (defined by the thickest sample / application)
Sheet resistance range

accuracy can be optimized over sheet resistance decade
within a customer specified range
0.001 – 10 Ohm/sq; 2 % accuracy & 1 % repeatability
10 – 100 Ohm/sq; 3 % accuracy & 1.5 % repeatability
100 – 3,000 Ohm/sq; 4 % accuracy & 2 % repeatability
Anisotropy ratio 0.33 – 3
Thickness measurement of thin films (e.g. copper) 1 nm – 2 mm (in accordance with sheet resistance)
Device dimension (w/h/d) 11.4 x 5.5 x 17.5 inch / 290 mm x 140 mm x 445 mm
Weight 10 kg
Available features Metal thickness measurement

 

Contact Us

You are welcome to contact our team for

  • Addressing questions
  • Request demo measurements
  • Request online or live demonstratons
  • Request quotations

CONTACT US

Picture Gallery of the EddyCus® TF lab 2020A

Sheet resistance measurement device EddyCus® TF lab 2020SR front
Sheet resistance measurement device EddyCus® TF lab 2020SR isometric view
Single point thin film sheet resistance measurement device EddyCus® TF lab 2020SR isometric view
Sheet resistance measurement device EddyCus® TF lab 2020 with monitor
Sheet resistance measurement device EddyCus® TF lab 2020SR with foil
Sheet resistance measurement device EddyCus® TF lab 2020SR with a glass
Single point thin film sheet resistance measurement device EddyCus® TF lab 2020SR with a wafer
Sheet resistance measurement device EddyCus® TF lab 2020SR with wafer and software

Product Overview Electrical Anisotropy and Sheet Resistance Measurement Systems

EddyCus® TF lab 2020HF – Analyzer of Permittivity, Conductivity and Permeability-related Measurement Tasks

The EddyCus® TF map 2020HF is a high frequency eddy current single point measurement device designed for material and thin-film characterization. The device is sensitive to characteristics that correlate with electric, dielectric and magnetic properties. Typical applications include the assessment of material composition, the measurement of residual moisture, wet coating thickness or permittivity, and the determination of the content level of conductive (e.g. C, Pt) or magnetic (e.g. Co) materials. SURAGUS also supports complex impedance analysis to derive information on electrical, dielectric or magnetic properties from hybrid materials with a single measurement. The exact capabilities regarding specific measurement tasks can be provided from a consultation with the SURAGUS team.

 

Software and Device Control

  • Very user-friendly software
  • Intuitive, touch display navigation
  • Real-time measurement of sheet resistance and layer thickness
  • Software-assisted manual mapping option
  • Various data saving and export options

Data Sheet for the EddyCus® TF lab 2020HF

Sheet resistance measurement technology Non-contact eddy current sensor
Substrates e.g. foil, glass and wafer, etc.
≥ 25 mm x 25 mm
Substrate area 8 inch / 204 mm x 204 mm (open to three sides)
Max. sample thickness / sensor gap (defines distances) 1 / 2 / 5 / 10 / 25 mm (defined by the thickest sample / application)
Sheet resistance range

accuracy can be optimized over sheet resistance decade
within a customer specified range
0.001 – 10 Ohm/sq; 2 % accuracy & 1 % repeatability
10 – 100 Ohm/sq; 3 % accuracy & 1.5 % repeatability
100 – 3,000 Ohm/sq; 4 % accuracy & 2 % repeatability
Anisotropy ratio 0.33 – 3
Thickness measurement of thin films (e.g. copper) 1 nm – 2 mm (in accordance with sheet resistance)
Device dimension (w/h/d) 11.4 x 5.5 x 17.5 inch / 290 mm x 140 mm x 445 mm
Weight 10 kg
Available features Metal thickness measurement

 

Contact Us

You are welcome to contact our team for

  • Addressing questions
  • Request demo measurements
  • Request online or live demonstratons
  • Request quotations

CONTACT US

Picture Gallery of the EddyCus® TF lab 2020HF

Sheet resistance measurement device EddyCus® TF lab 2020SR front
Sheet resistance measurement device EddyCus® TF lab 2020SR isometric view
Single point thin film sheet resistance measurement device EddyCus® TF lab 2020SR isometric view
Sheet resistance measurement device EddyCus® TF lab 2020 with monitor
Sheet resistance measurement device EddyCus® TF lab 2020SR with foil
Sheet resistance measurement device EddyCus® TF lab 2020SR with a glass
Single point thin film sheet resistance measurement device EddyCus® TF lab 2020SR with a wafer
Sheet resistance measurement device EddyCus® TF lab 2020SR with wafer and software

Product Overview Permittivity, Conductivity and Permeability-related Measurement Devices

EddyCus® TF lab 2020RM – Multi-Purpose Single Point Resistivity Tester

The EddyCus® TF lab 2020RM is a unique industrial eddy current measurement device utilizing frequencies from 10 kHz up to 100 MHz dedicated to the characterization of flat specimen. The variation of the measurement frequency allows the control of the penetration depth. The measurement with high frequencies benefits the characterization of near surface material characteristics of bulk materials and thin films. Additionally, the sensitivity increases with increasing measurement frequency. Therefore also very low conductive materials and layers can be characterized. Furthermore, the device supports the generation of depth profiles by utilization of multi frequency measurements. Measurement parameters are conductivity and related characteristics.

More about the EddyCus® TF lab 2020RM

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