EddyCus® TF lab 4040 Series -
Non-contact Sheet Resistance, Metal Layer Thickness, Optical Transparency and El. (An)isotropy Measurement Device

The EddyCus® TF lab 4040 Series is dedicated to non-contact single point measurements on medium sized substrates. The flexibly applicable bench-top device allows depending of its setup the precise manual measurement of sheet resistance, metal thickness, optical transparency or electrical (an)isotropy. Most common applications include the measurement of thin conductive transparent and non-transparent layers, wafers or metal sheets.

Highlights

  • Non-contact, real time, robust
  • Accurate and very repeatable measurements
  • High measurement quality without influence of:
    • Homogeneous contact quality
    • Passivation / Encapsulation
    • Roughness
  • No harm to sensitive layers
  • Precise measurement of
    • Conventional conductive thin-films
    • Grids and wire structures
    • Multi-layer systems
    • Hidden and encapsulated conductive layers
  • No wearing
  • Software guided manual mapping for systematic quality assurance
  • Many measurement data saving and export functions
  • Space saving smart monitor integration (for measurement per touch screen and data evaluation)
  • Software development kit test automation using customer programs 

Types

The device can be equipped with different sensors including eddy current sensors for electrical characterization or sensors for optical characterization. Variants of the device platform involve the following options.

Combinations of the above are available as well (e.g. 4040SR-MT-T-R-H).

Characteristics

  • Technology: Non-contact eddy current (various sensor types)
  • Single point measurement
  • Positioning area: 760 mm x 660 (open) mm
  • Recommended sample sizes: 10 x 10 mm² to 400 x 400 mm² (0.5 x 0.5 inches to 16 x 16 inches)
  • Parameters:
    • Sheet resistance 0.1 mOhm/sq to 100 kOhm/sq
    • Metal layer thickness 1 nm to 2 mm (other on request) 
    • Optical Transparency 0.01 – 100 %
    • Electrical Anisotropy 0.33 - 3

REQUEST A QUOTE

 

Please select your preferred measurement parameter below

Sheet Resistance

Metal Thickness

Optical transparency

Anisotropy

Wet Coating Thickness and Residual Moisture

EddyCus® TF lab 4040SR – Non-contact Single Point Sheet Resistance Tester

The EddyCus® TF lab 4040SR is a non-contact single point sheet resistance measurement system. The device contains an eddy current sensor set that induces weak currents into conductive films and material. The induced currents in the specimen generate an electromagnetic field that correlates with the sheet resistance of the measure object. The technology is independent from surface characteristics or morphology. Furthermore, it does not require any sort of sufficient specimen contact or preparation such as known from 2- or 4-point probe testing (2PP, 4PP) or hall effect or Van-der-Pauw measurements. It neither requires the setup of test structures nor it is affected by surface roughness or non-conductive encapsulations or passivation layers. Additionally, the measurement does not physically affect the tested thin-film. Eddy current Instruments have a long-life time since there is mechanical wearing. Its independence from contact qualities and its high speed allows enables high repeatability and the accuracies that are beneficial for systematic quality assurance of various thin-films in R&D and testing laboratories. The EddyCus tools can be driven by SURAGUS software with various data recording and export functions or by customer software driven by SURAGUS software development kits.

Software and Device Control

  • Very user-friendly software
  • Intuitive, touch display navigation
  • Real-time measurement of sheet resistance, layer thickness and optical transparency depending on setup
  • Software-assisted manual mapping option
  • Various data saving and export options

Data Sheet for EddyCus® TF lab 4040SR

Measurement technology Non-contact eddy current sensor
Substrates Foils, glass, wafer, etc.
Substrate area 29.5“ x 25.6“ / 750 mm x 650 mm (for 400 mm x 400 mm samples)
Max. sample thickness/ sensor gap 3 / 5 / 10 / 25 mm (defined by the thickest sample)
Thickness measurement range of metal films (e.g. copper) 2 nm – 2 mm (in accordance with sheet resistance (cf. our calculator))
Device dimensions (w/h/d) 30“ x 12“ x 26“ / 760 mm x 310 mm x 660 mm
Weight 20 kg
Further available features Sheet resistance measurement, Metal thickness tester, Anisotropy sensor , Optical transmittance, reflectance, haze
  VLSR LSR MSR HSR VHSR
  6 decades are measurable by one sensor, but with slightly affected accuracy
Range [Ohm/sq] 0.0001 – 0.1 0.1 – 10 0.1 – 100 10 – 2000 1,000 – 200,000
Accuracy / Bias ± 1% ± 1 – 3% ± 3 – 5%
Repeatability (2σ) < 0.3% < 0.5% < 0.3%
VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistance

 

Contact Us

You are welcome to contact our team for

  • Addressing questions
  • Request demo measurements
  • Request online or live demonstrations
  • Request quotations

CONTACT US

Picture Gallery of the EddyCus® TF lab 4040SR

Single Point sheet resistance measurement device EddyCus® TF lab 4040SR with foil
Single point thin-film characterization device EddyCus® TF lab 4040SR
Single point sheet resistance tester EddyCus® TF lab 4040SR with wafer
Measurement of sheet resistance EddyCus® TF lab 4040SR with foil and software
Single Point sheet resistance measurement device EddyCus® TF lab 4040SR with foil
Single point thin-film characterization device EddyCus® TF lab 4040SR with glass
Single point sheet resistance tester EddyCus® TF lab 4040SR with wafer
Measurement of sheet resistance EddyCus® TF lab 4040SR with foil and software

Product Overview Sheet Resistance Measurement Systems

EddyCus® TF lab 4040MT – Non-contact Single Point Metal Thickness Tester

The EddyCus® TF lab 4040MT allows the non-contact metal thicknesses measurement of transparent and non-transparent layers. The measurement is achieved using a non-contact eddy current sensor. It demines the metal thickness of materials with known or (rather) constant conductivity in real-time. This non-contact testing technology enables a precise measurement in a wide thickness range starting at a few nanometer thickness reaching up to the characterization of thick metal sheets and plates. The technology is also able to characterize metal layers that are covered by non-conducive materials. SURAGUS offers material specific setups for very thin layers and also very thick metals and common alloys. The measurement method is extremely robust and excels with a high repeatability and high accuracy. Additionally, it does not require any optical transparency nor to apply a physical contact. Therefore, it is used for a wide range of application for quick tests or systematic quality assurance. 

Software and Device Control

  • Very user-friendly software
  • Intuitive, touch display navigation
  • Real-time measurement of sheet resistance, layer thickness and optical transparency depending on setup
  • Software-assisted manual mapping option
  • Various data saving and export options

Data Sheet for EddyCus® TF lab 4040MT

Measurement technology Non-contact eddy current sensor
Substrates Foil, glass, wafer, etc.
Substrate area 29.5“ x 25.6“ / 750 mm x 650 mm (for 400 mm x 400 mm samples)
Max. sample thickness/ sensor gap 3 / 5 / 10 / 25 mm (defined by the thickest sample)
Metal thickness range
Accuracies depend on the selected setup and the type /
conductivity of the metal (e.g. copper, aluminum, silver)
Low             1 – 10 nm; 2 – 5 % accuracy
Standard    10 – 1,000 nm; 1 – 3 % accuracy
High            1 – 100 µm; 0.5 – 3 % accuracy
Metal thickness calibration Direct thickness calibration / sheet resistance conversion
Device dimensions (w/h/d) 30“ x 12“ x 26“ / 760 mm x 310 mm x 660 mm
Weight 20 kg
Further available features / other tool configurations Sheet resistance measurement / conductivity / resistivity / emissitivity / permeability (beta)  / electrical anisotropy / optical transmittance / optical reflectance / haze

 

Contact Us

You are welcome to contact our team for

  • Addressing questions
  • Request demo measurements
  • Request online or live demonstrations
  • Request quotations

CONTACT US

Picture Gallery of the EddyCus® TF lab 4040MT

Single Point sheet resistance measurement device EddyCus® TF lab 4040SR with foil
Single point thin-film characterization device EddyCus® TF lab 4040SR
Single point sheet resistance tester EddyCus® TF lab 4040SR with wafer
Measurement of sheet resistance EddyCus® TF lab 4040SR with foil and software
Single Point sheet resistance measurement device EddyCus® TF lab 4040SR with foil
Single point thin-film characterization device EddyCus® TF lab 4040SR with glass
Single point sheet resistance tester EddyCus® TF lab 4040SR with wafer
Measurement of sheet resistance EddyCus® TF lab 4040SR with foil and software

Product Overview Metal Thickness Measurement Systems

EddyCus® TF lab 4040HS – Non-Contact Sheet Resistance & Optical Transmittance Tester

The EddyCus® TF lab 4040HS allows the simultaneous measurement of:

  • Sheet resistance (Ohm/sq)
  • Optical transparency / optical density / degree of production optical density (%)

It is a compact hybrid benchtop device that is dedicated to the needs of developers and manufacturer of transparent conductive materials (TCM). It precisely determines in non-contact the two main functions of transparent conductive materials: its optical transparency/ density and its sheet resistance. It supports the systematic characterization and quality assurance for deposition, doping and annealing processes in a variety of materials for research and development as well as for manufacturing companies.

Advantages

  • Non-contact and simultaneous real-time measurement of sheet resistance and optical transparency
  • One system
  • This hybrid system requires less space than two separate systems
  • Lower investment costs
  • Fast and systematic characterization 
Non-Contact_Large_Area_Graphene_Metrology_Mapping_SURAGUS_EddyCus_TF_lab_4040_Hybrid

Software and Device Control

  • Very user-friendly software
  • Intuitive, touch display navigation
  • Real-time measurement of sheet resistance, layer thickness and optical transparency depending on setup
  • Software-assisted manual mapping option
  • Various data saving and export options

Data Sheet for the EddyCus® TF lab 4040HS

Measurement technology Non-contact eddy current sensor and optical sensor
Substrates Foils, glass, wafer, etc.
Substrate area 29.5“ x 26.5“ / 750 mm x 650 mm (for 400 mm x 400 mm samples)
Max. sample thickness / sensor gap 1 / 2 / 5 / 10 mm (defined by the thickes sample)
Sheet resistance range Standard   0.01 – 1,000 Ohm/sq; 1 to 5 % accuracy
Thickness measurement of thin films (e.g. Copper) 2 nm – 2 mm (in accordance with sheet resistance)
Spectral resolution* 0.27 nm
Spectral optical transmittance, reflectance range 0 – 100 % , resolution of 0.1 %
Spectral range* 400 – 1,100 nm or 220 – 2,000 nm
Integration time 1 s or 50 ms – 10 minutes
Device dimensions (w/h/d) / weight 30“ x 12“ x 26“ / 760 mm x 310 mm x 660 mm / 30 kg
Further available features Spectral haze measurement in transmission

 

Contact Us

You are welcome to contact our team for

  • Addressing questions
  • Request demo measurements
  • Request online or live demonstrations
  • Request quotations

REQUEST A QUOTE

Picture Gallery of the EddyCus® TF lab 4040HS

Single Point sheet resistance measurement device EddyCus® TF lab 4040SR with foil
Single point thin-film characterization device EddyCus® TF lab 4040SR
Single point sheet resistance tester EddyCus® TF lab 4040SR with wafer
Measurement of sheet resistance EddyCus® TF lab 4040SR with foil and software
Glass_TF_lab_4040SR-T-R-H_close_up.jpg
Glass_TF_lab_4040SR-T-R-H_front_close_up.jpg

EddyCus® TF lab 4040A – Non-Contact Electrical Anisotropy and Sheet Resistance Tester

The EddyCus® TF lab 4040A (Anisotropy) is dedicated to the measurement of the electrical anisotropy and the sheet resistances in certain directions. It is relevant especially for functional thin-film that need to be conductive mainly in a certain direction, while achieving highest optical transparencies. This novel device is equipped with integrated sheet resistance anisotropy sensors. The sensors induce currents, which are directed into machine and traverse direction. The results of these directed sheet resistances are used to precisely reflect the electrical anisotropy. This non-contact testing method provides results in real-time and prevents time consuming destructive testing. It is used for fast tests and systematic quality assurance in various industries.

 

Terms and Concept

  •  “Sheet resistance anisotropy” refers to a difference in electrical resistivity measured parallel and perpendicular (traverse) to the machine direction
  • Many wire and mesh structures can have an anisotropic sheet resistance

Electrical Anisotropy…

  • …can be optimized according to the layout of the contact pattern
  • …can save material and improve optical transparency to sheet resistance ratio

Information

  • Sheet resistance (Ohm/sq)
    • Machine direction (Ohm/sq)
    • Traverse direction (Ohm/sq)
  • Combined sheet resistance (Ohm/sq)
  • Anisotropy
    • Ratio TD/MD
    • Anisotropy (%)

Typical Materials

  • Nano-wires (Ag, Pt, Au etc.)
  • Metal meshes and grids (Cu, Au, etc.)
  • Carbon Nano Tubes
  • Nano-rods

Anisotropy Description

aniso ratio.jpg
aniso percent.jpg

 

 

 

 

Electrical Anisotropy.PNG
Electrical Anisotropy2.PNG

Data Sheet for the EddyCus® TF lab 4040A

Measurement technology Non-contact eddy current sensor with directed current induction
Substrates Foils, glass, wafer, etc.
Substrate area 29.5” x 25.6” / 750 mm x 650 mm (for 400 mm x 400 mm samples)
Max. sample thickness / sensor gap 3 / 5 / 10 / 25 mm (defined by the thickest sample)
Sheet resistance range 0.01 – 1,000 Ohm/sq; 1 to 5 % accuracy
Anisotropy range (TD/MD) 0.33 – 3 (larger upon request)
Device dimensions (w/h/d) 30” x 12” x 26” / 760 mm x  310 mm x 660 mm
Weight 20 kg
Further available features Metal thickness, optical transmittance and reflectance, sheet resistance, emissivity, resistivity and anisotropy measurement

 

Contact Us

You are welcome to contact our team for

  • Addressing questions
  • Request demo measurements
  • Request online or live demonstrations
  • Request quotations

CONTACT US

Picture Gallery of the EddyCus® TF lab 4040A

SURAGUS_EddyCus_TF_4040SR-A_front.jpg
SURAGUS_EddyCus_TF_4040SR-A_isometric.jpg
Foil_SURAGUS_EddyCus_TF_4040SR-A_top_focus.jpg
Foil_SURAGUS_EddyCus_TF_4040SR-A_isometric_sample_focus.jpg

Product Overview Sheet Resistance & El. Anisotropy Measurement Systems

EddyCus® TF lab 4040HF – Analyzer of Permittivity, Conductivity and Permeability-related Measurement Tasks

The EddyCus® TF map 4040HF is a high frequency eddy current single point measurement device designed for material and thin-film characterization. The device is sensitive to characteristics that correlate with electric, dielectric and magnetic properties. Typical applications include the assessment of material composition, the measurement of residual moisture, wet coating thickness or permittivity, and the determination of the content level of conductive (e.g. C, Pt) or magnetic (e.g. Co) materials. SURAGUS also supports complex impedance analysis to derive information on electrical, dielectric or magnetic properties from hybrid materials with a single measurement. The exact capabilities regarding specific measurement tasks can be provided from a consultation with the SURAGUS team.

 

Software and Device Control

  • Very user-friendly software
  • Intuitive, touch display navigation
  • Real-time measurement of sheet resistance and layer thickness
  • Software-assisted manual mapping option
  • Various data saving and export options

Data Sheet for the EddyCus® TF lab 4040HF

Measurement technology Non-contact high frequency eddy current sensor
Substrates Foils, glass, various containers
Substrate area 750 mm x 650 mm / 29.5“ x 25.6“ (for 400 mm x 400 mm samples)
Max. sample thickness/ sensor gap Transmission setup: 3 – 50 mm (defined by the thickest sample)
Reflection setups: infinite (only surface area is analyzed) 

Measurement types

Wet thickness (µm) / weight (g/m²) / drying status (%) /
conductivity (MS/m) / resistivity (mOhm cm) / permeability (H/m) Beta /
permittivity (F/m) Beta
Measurement range / accuracy Depends on the measurement task, the material composition
and the test object volume. Please consult the SURAGUS team
Device dimensions (w/h/d) 30“ x 12“ x 26“ / 760 mm x 310 mm x 660 mm
Weight 20 kg
Further available measurements Sheet resistance, metal thickness, anisotropy, optical transmittance, reflectance, haze

 

Contact Us

You are welcome to contact our team for

  • Addressing questions
  • Request demo measurements
  • Request online or live demonstrations
  • Request quotations

CONTACT US

Picture Gallery of the EddyCus® TF lab 4040HF

Sheet resistance measurement device EddyCus® TF lab 2020SR front
Sheet resistance measurement device EddyCus® TF lab 2020SR isometric view
Single point thin film sheet resistance measurement device EddyCus® TF lab 2020SR isometric view
Sheet resistance measurement device EddyCus® TF lab 2020 with monitor
Sheet resistance measurement device EddyCus® TF lab 2020SR with foil
Sheet resistance measurement device EddyCus® TF lab 2020SR with a glass

Product Overview Permittivity, Conductivity and Permeability-related Measurement Devices

Contact

For product requests contact us by using the

For a prompt and informative response, please describe your measurement task (material, sample dimensions, expected measurement range) and provide your phone number.

Consent to data processing

By sending this form, I permit SURAGUS GmbH to process my data for contacting me. For more details see our Imprint & Privacy Policy