EddyCus® TF map 5050 Series – Contactless Sheet Resistance, Metal Layer Thickness, Resistivity and Anisotropy Imaging Device

The Eddy­Cus® TF map 5050 Series is a high-res­ol­u­tion non-contact ima­ging device series for sampling areas up to 500 x 500 mm (20 x 20 inch). The bench-top device auto­mat­ic­ally meas­ures at vari­ous meas­ure­ments points, typ­ic­ally with a pitch in X and Y of 1 mm (40 mil) gen­er­at­ing ac­cur­ate map­pings. The system acquires hundreds of measurements per second on the fly resulting in high resolution images containing up to 250,000 measurement points per sample. The bench-top devices allow depending of its setup the precise imaging of metal thickness, sheet resistance or electrical anisotropy. The resulting property images provide a deep insight to layer homogeneity and defect density and hence offer a profound basis for material and process optimization. Applications involve quality assurance for sputtering, evaporation, ALD, CVD, electroplating or doping and annealing processes.

Highlights

  • Non-contact imaging
  • Fast and accurate
  • High resolution imaging with 1 mm pitch (alternatively 0.25 to 10 mm)
  • Sampling areas of 500 x 500 mm (20 x 20 inches)
  • Advanced layer uniformity analysis and defectoscopy
  • Characterization of hidden and encapsulated conductive layers
  • Profound software-integrated analysis functions (line profiles, histogram analysis, selective area analysis, statistics)
  • Hybrid systems (eg. combined electrical and optical imaging)
  • Systematic quality control, incoming inspection, inspection of outgoing goods

Types

Devices are offered with different sensor configurations using eddy current sensors of optical components.

Combinations of the above variants are available as well (e.g. 5050SR-MT-A).

Characteristics

  • Technology: non-contact eddy current sensor
  • Sampling area: 500 x 500 mm
  • Recommended sample sizes: 1 to 20 inch / 25 mm to 500 mm 
  • Measurements:
    • Sheet resistance range: 0.1 mOhm/sq to 10,000 Ohm/sq
    • Metal layer thickness: 1 nm to 2 mm (other on request) 
    • Electrical anisotropy: 0.3 – 3
  • Pro­cesses assessment
    • De­pos­ition (sput­ter­ing, evap­or­a­tion, ALD, CVD, elec­tro­plat­ing, print­ing, cast­ing etc.)
    • Dop­ing and an­neal­ing
    • Ab­la­tion (etch­ing, pol­ish­ing, laser, EDM etc.)

Soft­ware and Device Con­trol

  • Easy to use setup
    • Scanning size selection
    • Measurement pitch selection
    • Starting measurement
  • Real-time data aggregation
  • Close measurements to the edge
    • Automated scan or manual measurement
  • Easy-to-use statistical analysis options
    • Selective image analysis
    • Line profile analysis
    • Histogram analysis
    • Statistics (min, max, average, variance)
  • Export
    • Image export using different color schemes
    • PDF report (example report)
    • Data export as txt for import into excel or origin
  • Data storage, data loading and reanalyzing
Sheet Resistance Analyzer Software shows sheet resistance mapping results like homogeneity or line profile

Please select your preferred measurement parameter below

Sheet Resistance

Metal Thickness

Resistivity Conductivity

Electrical Anisotropy

EddyCus® TF map 5050SR – Non-contact Sheet Resistance Imaging Device

The EddyCus® TF map 5050SR is a non-contact sheet resistance imaging system. The system moves an eddy current sensor across the specimen. It measures on the fly the sheet resistance every 1 mm (40 mil) on up to 225.000 (500 x 500) measurements points per scan. The system excels with high accuracy since it operates independent from the contact quality. The resulting high resolution images enable a confident assessment of the layer quality as this tool also exposes small defected areas. The software comprises easy to apply analysis features that involve statistics, reporting and exporting functions dedicated to systematic quality assurance.

Data Sheet for EddyCus® TF lab 5050SR

Sheet resistance measurement technology Non-contact eddy current sensor
Substrates e.g. foils, glass, etc.
2 / 4 / 6 / 8 / 12 inch wafer
Max. scanning area 20 inch / 508 mm x 508 mm (larger on request)
Edge effect correction / exclusion 2 - 5 mm edge exclusion for standard sizes
Max. sample thickness / sensor gap (defines distances) 2 / 5 / 10 / 25 mm (defined by the thickest sample / application)
Sheet resistance range

accuracy can be optimized over sheet resistance decade
within a customer specified range
0.0001 – 10 Ohm/sq; 2 to 7 % accuracy & 1 % repeatability
0.01 – 1,000 Ohm/sq; 2 to 7 % accuracy & 1.5 % repeatability
10 – 10,000 Ohm/sq; 3 to 7 % accuracy & 2 % repeatability
Thickness measurement of metal films (e.g. copper) 1 nm – 2 mm (in accordance with sheet resistance (cf. our calculator))
Scanning pitch 1 / 2 / 5 / 10 mm (other on request)
Measurement points per time (quadratic shape) 10,000 measurement points in 5 minutes
1,000,000 measurement points in 30 minutes
Scanning time 8 inch / 200 mm x 200 mm in 0.5 to 5 minutes (1 – 10 mm pitch)
12 inch / 300 mm x 300 mm in 1.5 to 15 minutes ( 1 – 10 mm pitch)
Device dimension (w/h/d) 46.5 x 11.4 x 35.4 inch / 1,180 mm x 290 mm x 900 mm
Weight 120 kg
Available features Metal thickness imaging
Anisotropy sheet resistance sensor

 

Contact Us

You are welcome to contact our team for

  • Addressing questions
  • Request demo measurements
  • Request online or live demonstratons
  • Request quotations

CONTACT US

Picture Gallery of the EddyCus® TF map 5050SR

Homogeneity measurement device EddyCus® TF map 5050SR
Sheet resistance mapping device EddyCus® TF map 5050
Measurement-field sheet resistance mapping device EddyCus® TF map 5050
SURAGUS EddyCus® TF map 5050SR sheet resistance mapping device
Sheet resistance mapping device EddyCus® TF map 5050SR side view

Product Overview Sheet Resistance Measurement Devices

EddyCus® TF map 5050MT – Non-contact Metal Thickness Imaging Device

The EddyCus® TF map 5050MT is a high-resolution metal thickness imaging device. The device uses an eddy current sensor for precise non-contact thickness measurement. This electromagnetic measurement method is a contactless method that is able to measure through non-conductive covering layers as well. The measurements for the high resolution thickness images are aggregated on the fly by automatically collecting hundreds of measurement at up to 250,000 positions across the sample. This measurement is independent from optical properties therefore it can also be well applied for thick non-transparent metal films. The measurement range is starting at a few nanometer reaching upto to a few millimeter. The eddy current thickness measurement method is very fast and robust. It provides a very high repeatability and high accuracy. This advanced thickness meter is dedicated to quick thickness imaging or systematic quality assurance.

Data Sheet for EddyCus® TF lab 5050MT

Sheet resistance measurement technology Non-contact eddy current sensor
Substrates e.g. foils, glass, etc.
2 / 4 / 6 / 8 / 12 inch wafer
Max. scanning area 20 inch / 508 mm x 508 mm (larger on request)
Edge effect correction / exclusion 2 – 5 mm edge exclusion for standard sizes
Max. sample thickness / sensor gap (defines distances) 2 / 5 / 10 / 25 mm (defined by the thickest sample / application)
Thickness measurement of metal films (e.g. copper)

accuracy can be optimized over sheet resistance decade
within a customer specified range
1 – 20 nm; 5 % accuracy & 2.5 % repeatability (specific SURAGUS thickness models may apply)
0.02 – 200 µm; 3 % accuracy & 1.5 % repeatability
200 – 2000 µm; 2 % accuracy & 1 % repeatability
Sheet resistance range 0.1 mOhm/sq – 10 kOhm/sq
Scanning pitch 1 / 2 / 5 / 10 mm (other on request)
Measurement points per time (quadratic shape) 10,000 measurement points in 5 minutes
1,000,000 measurement points in 30 minutes
Scanning time 8 inch / 200 mm x 200 mm in 0.5 to 5 minutes (1 – 10 mm pitch)
12 inch / 300 mm x 300 mm in 1.5 to 15 minutes ( 1 – 10 mm pitch)
Device dimension (w/h/d) 46.5 x 11.4 x 35.4 inch / 1,180 mm x 290 mm x 900 mm
Weight 120 kg
Available features Sheet resistance imaging
Anisotropy sheet resistance sensor

 

Contact Us

You are welcome to contact our team for

  • Addressing questions
  • Request demo measurements
  • Request online or live demonstratons
  • Request quotations

CONTACT US

Picture Gallery of the EddyCus® TF map 5050MT

Homogeneity measurement device EddyCus® TF map 5050SR
Sheet resistance mapping device EddyCus® TF map 5050
Measurement-field sheet resistance mapping device EddyCus® TF map 5050
SURAGUS EddyCus® TF map 5050SR sheet resistance mapping device
Sheet resistance mapping device EddyCus® TF map 5050SR side view

Product Overview Metal Thickness Testing Devices

EddyCus® TF map 5050RM – Conductivity Mapping and Defect Identification in Thin Films

A variety of materials characteristics determine the conductivity of materials. Next to its composition also its structure and its purity affect the conductivity. The Eddy­Cus® TF map 5050RM is an eddy current mapping system dedicated to high-resolution imaging of conductivity and correlated characteristics exposing material properties, effects and defects. The system can be equipped with various EddyCus sensors for conductivity imaging in high resolution or high penetration and defect detection by use of differential probes. The system supports the creation of images (Eddy Current C-Scans) of the surface with a measurement pitch of 100 µm to 10 mm. The three axis systems is capable to scan 2D and 2.5D areas with a size of up to 500 x 500 mm / 20 x 20 inch. Typical applications cover the surface characterization of conductive materials such as SiC-, Graphite-, metal, alloy or steel plates or other conductive semi-finished products. Additionally, the system can be used for testing the electrical integrity of printed electronics and layers.

Eddy current testing allows the quantification of material conductivity [IACS or MS/m] or resistivity [Ohm m or Ohm / mm² / m]. The conductivity of materials provides information on material characteristics such as type of material and homogeneity of the material composition. Next to the direct information on electrical properties, the conductivity also contains information that relate to its thermic properties or its mechanical properties and its structural integrity.

Specification

  • Measurement range : 0.1 – 110 % IACS
  • Specimen sizes : 5 x 5 mm to 500 x 500 mm
  • Shapes: flat and curved surfaces
  • Exchangeable sensors dedicated to specific measurement task
  • Customized specimen holder in terms of layout and shape in favor to specimen dimensions
  • Data analysis, export and reporting functions

Conductivity determination and conductivity imaging provides insights on:

  • Material types and material purities
  • Evaluation of material composition and composition variation
  • Impurities/ dotation
  • Variances in structure and structural integrity
  • Solidification behavior of casted materials
  • Conductivity-affected characteristics such as hardness, stress, grain boundaries and other characteristics

Data Sheet for EddyCus® TF lab 5050RM

Sheet resistance measurement technology Non-contact eddy current sensor
Substrates Flat, slightly curved
Max. scanning area 500 mm x 500 mm x 10 mm
Edge effect correction / exclusion 2 – 5 mm edge exclusion for standard sizes
Max. sample thickness / sensor gap (defines distances) 10 mm
Sheet resistance range
Conductivity range
Resistivity range
0.005 – 50 Ohm/sq
0.01 – 65 MS/m
1.5 – 10,000 µOhm*cm
Min. pitch 0.1 mm
Mode Contact and non-contact
Speed 400 mm per second (time 1 to 30 minutes)
Device dimension (w/h/d) 46.5 x 11.4 x 35.4 inch / 1,180 mm x 290 mm x 900 mm
Weight 120 kg
Available features Sheet resistance imaging
Metal thickness imaging
Anisotropy sheet resistance sensor

 

Contact Us

You are welcome to contact our team for

  • Addressing questions
  • Request demo measurements
  • Request online or live demonstratons
  • Request quotations

CONTACT US

Picture Gallery of the EddyCus® TF map 5050RM

Homogeneity measurement device EddyCus® TF map 5050SR
Sheet resistance mapping device EddyCus® TF map 5050
Measurement-field sheet resistance mapping device EddyCus® TF map 5050
SURAGUS EddyCus® TF map 5050SR sheet resistance mapping device
Sheet resistance mapping device EddyCus® TF map 5050SR side view

EddyCus® TF map 5050A – Non-Contact Electrical Anisotropy and Sheet Resistance Imaging Device

The EddyCus® TF map 5050A (Anisotropy) is a unique anisotropy imaging system providing spatially resolved anisotropy images for profound understanding of the dominant orientation in wire structures. It utilized eddy current sensors that induce currents into defined directions. The resulting image shows the dominating wire direction, the anisotropy strength and the resulting sheet resistance. This unique tool is valuable for the characterization of wire structures such as Silver Nano Wires (Ag-NW), CNT, metal grids or nano-rod structures. Intentional anisotropic nanowires provide a better sheet resistance to optical transparency performance compared to isotropic nano-wire electrodes with opposite contact structure. This non-destructive testing method saves time and ensures that the wire deposition process provides the required orientation and resistance. This tool can be applied for quick quality checks or systematic quality assurance.

Terms and concept

  •  “Sheet resistance anisotropy” refers to a difference in electrical resistivity measured parallel and perpendicular (traverse) to the machine direction
  • Many wire and mesh structures can have an anisotropic sheet resistance

Electrical anisotropy…

  • …can be optimized according to the layout of the contact pattern
  • …can save material and improve optical transparency to sheet resistance ratio

 

Data Sheet for EddyCus® TF lab 5050A

Sheet resistance measurement technology Non-contact eddy current sensor
Substrates e.g. foils, glass, etc.
≥ 100 mm x 100 mm
Max. scanning area 20 inch / 508 mm x 508 mm (larger on request)
Edge effect correction / exclusion 2 – 5 mm edge exclusion for standard sizes
Max. sample thickness / sensor gap (defines distances) 2 / 5 / 10 / 25 mm (defined by the thickest sample / application)
Sheet resistance range

accuracy can be optimized over sheet resistance decade
within a customer specified range
0.01 – 10 Ohm/sq; 2 to 7 % accuracy & 1 % repeatability
1 – 100 Ohm/sq; 2 to 10 % accuracy & 1.5 % repeatability
10 – 300 Ohm/sq; 2 to 10 % accuracy & 2 % repeatability
Anisotropy range 0.33 – 3
Thickness measurement of metal films (e.g. copper) 1 nm – 2 mm (in accordance with sheet resistance (cf. our calculator))
Scanning pitch 1 / 2 / 5 / 10 mm (other on request)
Measurement points per time (quadratic shape) 10,000 measurement points in 5 minutes
1,000,000 measurement points in 30 minutes
Scanning time 8 inch / 200 mm x 200 mm in 0.5 to 5 minutes (1 – 10 mm pitch)
12 inch / 300 mm x 300 mm in 1.5 to 15 minutes ( 1 – 10 mm pitch)
Device dimension (w/h/d) 46.5 x 11.4 x 35.4 inch / 1,180 mm x 290 mm x 900 mm
Weight 120 kg
Available features Metal thickness imaging

 

Contact Us

You are welcome to contact our team for

  • Addressing questions
  • Request demo measurements
  • Request online or live demonstratons
  • Request quotations

CONTACT US

Picture Gallery of the EddyCus® TF lab 5050A

Homogeneity measurement device EddyCus® TF map 5050SR
Sheet resistance mapping device EddyCus® TF map 5050
Measurement-field sheet resistance mapping device EddyCus® TF map 5050
SURAGUS EddyCus® TF map 5050SR sheet resistance mapping device
Sheet resistance mapping device EddyCus® TF map 5050SR side view

Product Overview Electrical Anisotropy and Sheet Resistance Measurement Systems

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